ALD

http://www.mnt-tech.net/index.php?m=index&a=category&id=109

https://news.cnpowder.com.cn/62146.html

https://www.koushare.com/video/videodetail/11475

参考资料：
(1) ALD魔咒—半导体材料与工艺(公众号)

MLD

 

Pulsed laser ablation in liquid (PLAL)

The pulsed laser ablation in liquid (PLAL) method has been mostly used to synthesize noble metal nanoparticles from their bulk metal targets. The PLAL synthesized nanoparticles were charged and free of surfactants, thus their colloids are very stable and pure.